Abstract: A tube type dielectric barrier discharge (DBD) chamber was used to carry out the discharge tests using a high-frequency high-voltage plasma power source, so as to study the effects of following factors on the ozone generation, such as the discharge voltage, gas flow rate and oxygen concentration, etc. Results show that the ozone concentration first increases and then decreases with rising discharge voltage, due to the accelerated decomposition of ozone with rising temperature. With the rise of gas flow rate, the ozone concentration reduces, which reaches the maximum value of 138 g/m³ at the oxygen flow rate of 1 L/min, while the power consumption of zone generation first decreases and then increases. The presence of nitrogen helps to promote the breakdown voltage, where the oxygen is more easily ionized with the rise of its concentration, thus the ozone concentration is increased and the power consumption is lowered.